Heterogeneous Integration on Organic Interposer Substrate with fine-pitch RDL and 40 micron pitch Micro-bumps
Author:
Affiliation:
1. IBM T. J. Watson Research Center,Albany,NY,U.S.A.
2. IBM Research,Tokyo,Japan
3. IBM Systems,NY,U.S.A.
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10195193/10195244/10195687.pdf?arnumber=10195687
Reference12 articles.
1. Artificial Intelligence (AI) based methodology to minimize asymmetric bare substrate warpage;raghavan;to be published in 2023 ECTC,0
2. An enhanced thermo-compression bonding process to address warpage in 3D integration of large die on organic substrates
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4. Low-cost wafer bumping
5. 3D Integration in VLSI Circuits
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