Understanding Influence of Substrate Floor Concavity on Sensitivity and Linearity Through a Parabolic Model: Theoretical Modeling and Analysis of Performance-Reference-Cited by-同舟云学术

Understanding Influence of Substrate Floor Concavity on Sensitivity and Linearity Through a Parabolic Model: Theoretical Modeling and Analysis of Performance

Published:2022-10-01 Issue:19 Volume:22 Page:18326-18331
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Uthaya Kumar Guru Aathavan Alagu¹,Jindal Sumit Kumar¹^ORCID,P K Sreekanth¹

Affiliation:

1. School of Electronics and Communication Engineering, Vellore Institute of Technology, Vellore, India

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/9906561/09857749.pdf?arnumber=9857749

Reference13 articles.

1. Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modelling and simulation

2. Capacitance response of concave well substrate touch-mode capacitive pressure sensor: Mathematical analysis and simulation

3. Capacitance Response of Concave Well Substrate MEMS Double Touch Mode Capacitive Pressure Sensor: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison

4. Investigation of the influence of double-sided diaphragm on performance of capacitance and sensitivity of touch mode capacitive pressure sensor: numerical modeling and simulation forecasting

5. Micromachined sensor structures with linear capacitive response

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