Novel Design of Double Touch Plano-Convex MEMS Capacitive Pressure Sensor: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison

Abstract

Due to advancements in Micro-Electro-Mechanical Systems (MEMS) fabrication technologies, researchers are incorporating numerous innovations in the design of capacitive pressure sensors (CPS). This work aims to present a novel CPS design using a plano-convex substrate to enhance the capacitance and sensitivity. Diaphragm deflection occurs due to its elastic property when pressure is applied to the diaphragm. This deflection reduces the distance between the diaphragm and substrate, thereby remarkably increasing capacitance. The Plano-Convex design offers added advantages of increased contact area between the diaphragm and substrate under applied pressure, hence significantly enhancing sensor sensitivity and range. More efficient and miniaturized CPSs are in high demand in medical instrumentation, aerospace, aviation, power plants and automotive industries. This work presents all the required mathematical calculations, modeling and simulations to support the proposed design. The diaphragm deflection simulation concerning pressure is conducted using COMSOL Multiphysics, while MATLAB is employed for analytical simulations related to changes in capacitance and capacitive sensitivity.