Capacitance response of concave well substrate touch-mode capacitive pressure sensor: Mathematical analysis and simulation-Reference-Cited by-同舟云学术

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Capacitance response of concave well substrate touch-mode capacitive pressure sensor: Mathematical analysis and simulation

Published:2021-08 Issue: Volume:114 Page:105118
ISSN:0026-2692
Container-title:Microelectronics Journal
language:en
Short-container-title:Microelectronics Journal

Author:

Kang MyongChol,Ri Chan,Choe JongHuan

Publisher

Elsevier BV

Subject

General Engineering

Reference24 articles.

1. A capacitive pressure sensor for MEMS;Gupta;Proc. SPIE,2003

2. Micromachined sensor structures with linear capacitive response;Rosenren;Sens. Actuators, A,1992

3. Touch Mode Silicon Capacitive Pressure Sensor;Ding,1990

4. Silicon microsensors and microactuators;Ko;Sensor. Mater.,1992

5. Modeling of circular diaphragm and spreadsheet solution programming for touch mode capacitive sensors;Meng;Sensor. Actuator.,1999

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1. A Theoretical Study on Static Gas Pressure Measurement via Circular Non-Touch Mode Capacitive Pressure Sensor;Sensors;2024-08-16

2. Novel Design of Double Touch Plano-Convex MEMS Capacitive Pressure Sensor: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison;Nano;2024-07-10

3. Analyzing the effects of polymeric dielectric materials on micro capacitive pressure sensors: A model incorporating displacement-dependent porosity;Heliyon;2024-05

4. Design and Numerical Simulation of Capacitive Pressure Sensor Based on Silicon Carbide;IEEE Sensors Journal;2023-12-15

5. Formulation Analysis and Follow-Up Study of Differential MEMS Touch-Mode Sensor Utilizing Capacitive Vacuum Gauge Framework for Low-Pressure Measurements;IEEE Sensors Journal;2023-04-15

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