Formulation Analysis and Follow-Up Study of Differential MEMS Touch-Mode Sensor Utilizing Capacitive Vacuum Gauge Framework for Low-Pressure Measurements-Reference-Cited by-同舟云学术

Formulation Analysis and Follow-Up Study of Differential MEMS Touch-Mode Sensor Utilizing Capacitive Vacuum Gauge Framework for Low-Pressure Measurements

Published:2023-04-15 Issue:8 Volume:23 Page:8224-8231
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Sreekanth P. K.¹^ORCID,Jindal Sumit Kumar¹^ORCID

Affiliation:

1. School of Electronics Engineering, Vellore Institute of Technology, Vellore, India

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/10102602/10064165.pdf?arnumber=10064165

Reference17 articles.

1. A new high precision, broad range gas micro-flow calibration apparatus

2. A touch mode MEMS capacitance diaphragm gauge

3. Comprehensive assessment of MEMS double touch mode capacitive pressure sensor on utilization of SiC film as primary sensing element: Mathematical modelling and numerical simulation

4. Design and experiment of a touch mode MEMS capacitance vacuum gauge with square diaphragm

5. Analysis of small deflection touch mode behavior in capacitive pressure sensors

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Novel Design of Double Touch Plano-Convex MEMS Capacitive Pressure Sensor: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison;Nano;2024-07-10

2. A Novel Capacitance-to-Time Converter for Differential-Type Capacitive Sensor Insensitive to Offset Mismatch and Parasitic Capacitance;IEEE Sensors Letters;2023-10