Author:
Jindal Sumit Kumar,Raghuwanshi Sanjeev Kumar
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Daigle M et al (2007) An analytical solution to circular touch mode capacitor. IEEE Sens J 7(4):502–505
2. Eswaran P, Malarvizhi S (2013) MEMS capacitive pressure sensors: a review on recent development and prospective. Int J Eng Technol 5:2734–2746
3. Gaopan Xu et al (2001) A surface micro machined double sided touch mode capacitive pressure sensor. SPIE 4601:25–30
4. Gupta A et al (2003) A capacitive pressure sensor for MEMS. SPIE 5062:450–454
5. Jindal SK et al (2015) A complete analytical model for clamped edge circular diaphragm non-touch and touch mode capacitive pressure sensor. In: Microsystem Technologies. Springer, Berlin. doi: 10.1007/s00542-015-2475-x
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