Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modelling and simulation

Author:

Jindal Sumit Kumar,Raghuwanshi Sanjeev Kumar

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Daigle M et al (2007) An analytical solution to circular touch mode capacitor. IEEE Sens J 7(4):502–505

2. Eswaran P, Malarvizhi S (2013) MEMS capacitive pressure sensors: a review on recent development and prospective. Int J Eng Technol 5:2734–2746

3. Gaopan Xu et al (2001) A surface micro machined double sided touch mode capacitive pressure sensor. SPIE 4601:25–30

4. Gupta A et al (2003) A capacitive pressure sensor for MEMS. SPIE 5062:450–454

5. Jindal SK et al (2015) A complete analytical model for clamped edge circular diaphragm non-touch and touch mode capacitive pressure sensor. In: Microsystem Technologies. Springer, Berlin. doi: 10.1007/s00542-015-2475-x

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