Research on a capacitive MEMS pressure sensor based on through glass via
Author:
Affiliation:
1. Beijing Smart‐chip Microelectronics Technology Co., Ltd Beijing China
2. Zhongguancun Xinhaizeyou Technology Co., Ltd Beijing China
3. Institute of Semiconductors, Chinese Academy of Sciences Beijing China
Abstract
Publisher
Wiley
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/mop.33909
Reference22 articles.
1. Fabry–Perot-based phase demodulation of heterodyne light-induced thermoelastic spectroscopy
2. Upconversion time-stretch infrared spectroscopy
3. Entangled photons enabled time-frequency-resolved coherent Raman spectroscopy and applications to electronic coherences at femtosecond scale
4. Highly Sensitive and Fast Hydrogen Detection Based on Light-Induced Thermoelastic Spectroscopy
5. Real-time molecular imaging of near-surface tissue using Raman spectroscopy
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