A complete analytical model for clamped edge circular diaphragm non-touch and touch mode capacitive pressure sensor

Author:

Jindal Sumit Kumar,Mahajan Ankush,Raghuwanshi Sanjeev Kumar

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Daigle M et al (2007) An analytical solution to circular touch mode capacitor. IEEE Sens J 7(4):502–505

2. Fragiacomo G et al (2010) Analysis of small deflection touch mode behaviour in capacitive pressure sensor. Sens Actuators A Phys 161:114–119

3. Jindal SK, Raghuwanshi SK (2014) A complete analytical model for circular diaphragm pressure sensor with freely supported edge. Microsys Technol. doi: 10.1007/s00542-014-2144-5

4. Ko WH, Wang Q (1999) Touch mode capacitive pressure sensors. Sens Actuators A Phys 75:242–251

5. Lee MK et al (2013) Numerical analysis of touch mode capacitive pressure sensor using graphical user interface. In: Gaol FL (ed) DEIT, vol 1. Springer, Berlin, Heidelberg, pp 371–377

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