The Influence of Pressure on the TCF of AlN-Based SAW Pressure Sensor
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/9711665/09669925.pdf?arnumber=9669925
Reference37 articles.
1. Dual mode acoustic wave sensor for precise pressure reading
2. High-temperature high-sensitivity AlN-on-SOI Lamb wave resonant strain sensor
3. A passively temperature-compensated dual-frequency aln-on-silicon resonator for accurate pressure sensing
4. Effects of AlN Coating Layer on High Temperature Characteristics of Langasite SAW Sensors
5. Flexible dual-mode surface acoustic wave strain sensor based on crystalline LiNbO3 thin film
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