Development of 0-level Packaged Dual SAW Pressure and Temperature Sensors on GaN Thin Membranes-Reference-Cited by-同舟云学术

Development of 0-level Packaged Dual SAW Pressure and Temperature Sensors on GaN Thin Membranes

Published:2023-03-27 Issue:2 Volume:2023 Page:218-226
ISSN:1453-8245
Container-title:Romanian Journal of Information Science and Technology
language:
Short-container-title:ROMJIST

Author:

VASILACHE Dan, ,NICOLOIU Aleaxandra,BOLDEIU George, ,

Abstract

The paper presents the design, manufacturing and characterization of 0-level packaged dual SAW pressure and temperature sensors developed on GaN/Si/Mo thin membranes. Molybdenum film was deposited on the backside of membrane, to support a higher pressure.

Publisher

Editura Academiei Romane

Reference12 articles.

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