High-temperature high-sensitivity AlN-on-SOI Lamb wave resonant strain sensor-Reference-Cited by-同舟云学术

High-temperature high-sensitivity AlN-on-SOI Lamb wave resonant strain sensor

Published:2018-06 Issue:6 Volume:8 Page:065315
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Dou Shaoxu¹,Qi Mengke¹,Chen Cong¹^ORCID,Zhou Hong¹,Wang Yong²,Shang Zhengguo¹,Yang Jing³,Wang Dengpan³,Mu Xiaojing¹

Affiliation:

1. Key Laboratory of Optoelectronic Technology & Systems, Ministry of Education and International R & D Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China

2. IHP - Innovations for High Performance Microelectronics, Leibniz Association, Frankfurt (Oder) 15236, Germany

3. Chongqing Acoustic-Optic-Electric Co. Ltd., China Electronic Technology Group Corp., Chongqing 400060, China

Funder

Ministry of Education of the People's Republic of China, Key technology innovation projects of key industries in Chongqing

National Key Research and Development Program of China

the

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5037721

Reference22 articles.

1. Fastener Failure Detection Using a Surface Acoustic Wave Strain Sensor

2. Fiber Bragg Grating Sensors for Harsh Environments

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