Dual mode acoustic wave sensor for precise pressure reading
Author:
Affiliation:
1. Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), Singapore 117685
2. The School of Electrical and Electronic Engineering, Nanyang Technology University, Singapore 639798
Funder
Agency for Science, Technology and Research (A*STAR)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Reference18 articles.
1. Y. Hezarjaribi , M. N. Hamidon , S. H. Keshmiri , and A. R. Bahadorimehr “ Capacitive pressure sensors based on MEMS, operating in harsh environments,” IEEE International Conference on Semiconductor Electronics (ICSE), 25–27 November 2008 ( IEEE, Piscataway, NJ, USA, 2008), pp. 184-187.
2. C. Kolle , W. Scherr , D. Hammerschmidt , G. Pichler , M. Motz , B. Schaffer , B. Forster , and U. Ausserlechner , “ Ultra low-power monolithically integrated, capacitive pressure sensor for tire pressure monitoring,” in Proceedings of the IEEE Sensors 2004, 24–27 October 2004 ( IEEE, Piscataway, NJ, USA, 2004), pp. 244-247.
3. Y. Zhang , R. Howver , B. Gogoi , and N. Yazdi , “ A high-sensitive ultra-thin MEMS capacitive pressure sensor,” In Transducers 2011–2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, 5–9 June 2011 ( IEEE, Piscataway, NJ, USA, 2011), PP. 112–115.
4. A. M. Anis , M. M. Abutaleb , H. F. Ragai , and M. I. Eladawy , “ SiC capacitive pressure sensor node for harsh industrial environment,” in 2011 Third International Conference on Computational Intelligence, Modelling and simulation, 20–22 September 2011 ( IEEE Computer Society, Los Alamitos, CA, USA, 2011), PP. 413–416.
5. Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements
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