Dual mode acoustic wave sensor for precise pressure reading
Author:
Affiliation:
1. Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), Singapore 117685
2. The School of Electrical and Electronic Engineering, Nanyang Technology University, Singapore 639798
Funder
Agency for Science, Technology and Research (A*STAR)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Reference18 articles.
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3. Y. Zhang , R. Howver , B. Gogoi , and N. Yazdi , “ A high-sensitive ultra-thin MEMS capacitive pressure sensor,” In Transducers 2011–2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, 5–9 June 2011 ( IEEE, Piscataway, NJ, USA, 2011), PP. 112–115.
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5. Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements
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