A high-performance resonant MEMS accelerometer with a residual bias error of 30 μg and scale factor repeatability of 2 ppm
Author:
Affiliation:
1. Silicon Microgravity Ltd.,Cambridge,UK
2. University of Cambridge,Silicon Microgravity Ltd., Nanoscience Centre,Dept. of Engineering,Cambridge,UK
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10103931/10103798/10103976.pdf?arnumber=10103976
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