Author:
Loret T.,Hardy G.,Vallee C.,Demutrecy V.,Kerrien T.,Cochain S.,Boutoille D.,Taibi R.,Blondeau R.
Cited by
2 articles.
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1. A high-performance resonant MEMS accelerometer with a residual bias error of 30 μg and scale factor repeatability of 2 ppm;2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2023-03-28
2. A Navigation-Grade Mems Vibrating Beam Accelerometer;2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS);2022-01-09