A Navigation-Grade Mems Vibrating Beam Accelerometer-Reference-Cited by-同舟云学术

A Navigation-Grade Mems Vibrating Beam Accelerometer

Published:2022-01-09 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
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Author:

Sobreviela-Falces Guillermo¹,Pandit Milind¹,Young Douglas²,Pili Callisto²,Mcintosh James²,Abbott Julian²,Brook Guy²,Reed Matthew²,Steinmann Philipp²,MacCarthy Niall²,Baker Colin²,Seshia Ashwin A.¹

Affiliation:

1. University of Cambridge,Nanoscience Centre, Department of Engineering,UK

2. Silicon Microgravity Ltd., Cambridge Innovation Park, Waterbeach,Cambridge,UK

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699447.pdf?arnumber=9699447

Reference16 articles.

1. Navigation grade accelerometer with quartz vibrating beam

2. A new high performance sigma-delta MEMS accelerometer for inertial navigation

3. High precision open-loop and closed-loop MEMS accelerometers with wide sensing range

4. To the production of a robust and highly accurate MEMS vibrating accelerometer

5. The NG DIVA: A navigation grade differential inertial vibrating beam accelerometer

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