High precision open-loop and closed-loop MEMS accelerometers with wide sensing range
Author:
Publisher
IEEE
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http://xplorestaging.ieee.org/ielx7/7477963/7479673/07479789.pdf?arnumber=7479789
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Meta-learning for few-shot sensor self-calibration to increase stress robustness;Engineering Applications of Artificial Intelligence;2024-12
2. Optimization and analysis of a closed-loop MEMS accelerometer with enhanced bandwidth;2024 IEEE Applied Sensing Conference (APSCON);2024-01-22
3. A Study on the Harmonic Distortion of Seismic-Grade Sigma-Delta MEMS Accelerometers Using a Multiple Degree-of-Freedom Model;Sensors;2023-10-02
4. A high-performance resonant MEMS accelerometer with a residual bias error of 30 μg and scale factor repeatability of 2 ppm;2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2023-03-28
5. A High-Linearity Closed-Loop Capacitive Micro-Accelerometer Based on Ring-Diode Capacitance Detection;Sensors;2023-02-01
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