Vibration Rectification Error Reduction in Mems Vibrating Beam Accelerometers by Using the F-Squared Method-Reference-Cited by-同舟云学术

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Vibration Rectification Error Reduction in Mems Vibrating Beam Accelerometers by Using the F-Squared Method

Published:2024-03-25 Issue: Volume: Page:1-4
ISSN:
Container-title:2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
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Author:

Miani Theo¹,Gurung Lokesh¹,Sobreviela-Falces Guillermo¹,Young Douglas¹,Baker Colin¹,Seshia Ashwin²

Affiliation:

1. Silicon Microgravity,Cambridge,UK

2. Cambridge University,Cambridge,UK

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10502028/10502030/10502084.pdf?arnumber=10502084

Reference7 articles.

1. A high-performance resonant MEMS accelerometer with a residual bias error of 30 μg and scale factor repeatability of 2 ppm

2. Monolithic quartz structure vibrating beam accelerometer (VBA) prototype test results

3. Continuous Mode-Reversal FM Accelerometer With 60-g FSR, 10-μg/K Drift, and VRE Rejection

4. High performance inertial navigation grade sigma-delta MEMS accelerometer

5. IEEE Standard Specification Format Guide and Test Procedure for Linear Single-Axis, Nongyroscopic Accelerometers;IEEE Std 1293-2018 (Revision of IEEE Std 1293-1998)

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