Design and simulation of a low pull-in voltage RF MEMS switch in series for X-band
Author:
Affiliation:
1. Shandong University of Science and Technology,College of Electronics and Information Engineering,Qingdao,China
Funder
National Natural Science Foundation of China
Shandong University
Natural Science Foundation of Shandong Province
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10164832/10164812/10165197.pdf?arnumber=10165197
Reference25 articles.
1. Electrothermally Actuated RF MEMS Switches Suspended on a Low-Resistivity Substrate
2. Microengineering. Modeling, simulation and measurement of the dynamic performance of an ohmic contact, electrostatically actuated RF MEMS switch;guo,2007
3. Investigation methods and approaches for alleviating charge trapping phenomena in ohmic RF-MEMS switches submitted to cycling test
4. Preparing of a high speed bistable electromagnetic RF MEMS switch
5. Research on Key Technology of Novel RF MEMS Switch Designing and Fabricating
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1. Recent Advances in Bio-MEMS and Future Possibilities: An Overview;Journal of The Institution of Engineers (India): Series B;2023-10-04
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