Preparing of a high speed bistable electromagnetic RF MEMS switch

Author:

Zhang Yong-hua,Ding Guifu,Shun Xiaofeng,Gu Donghua,Cai Bingchu,Lai Zongsheng

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. RF MEMS switches and applications;Newman,2002

2. MEMS and Si micromachined circuits for high-frequency applications;Katehi;IEEE Trans. Microw. Theory Tech.,2002

3. RF MEMS switches and switch circuits;Rebeiz;IEEE Microwave Mag.,2001

4. Mechanical design and optimization of capacitive micromachined switch;Huang;Sens. Actuators A,2001

5. Monolithically integrated micromachined RF MEMS capacitive switches;Park;Sens. Actuators A,2001

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