1. J. Putrino, G. Keating, A. Martyniuk, M. Faraone, L. Dell, Chemical and biological sensors based on microelectromechanical systems, in Nanomaterials: science and applications. (Pan Stanford Publ. Pte Ltd, Singapore, 2016), pp.107–145
2. N.S. Shanbhag, P.P. Patil, Bio-microelectromechanical systems: a novel approach for drug targeting in chronic diseases. New Horiz. Transl. Med. 36, 265–271 (2017)
3. L. Yunjia, Microelectromechanical systems (MEMS), in Material-integrated intelligent systems: technology and applications. (Wiley, New York, NY, USA, 2016), pp.83–105
4. M. Rafiee, P. Khatibi, G. Zehetbauer, A review of the most important failure, reliability and nonlinearity aspects in the development of microelectromechanical systems (MEMS). Microelectron. Int. 34(1), 9–21 (2017)
5. P. Bergveld, The challenge of developing microTAS (Springer, Dordrecht, 1955), pp.3745–3770