Affiliation:
1. School of Microelectronics, Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, China
2. Nanofabrication Facility, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, China
Funder
National Key Research and Development Program of China
Natural Science Foundation Key Project of Jiangxi Province, China
Key Laboratory Construction Project of Nanchang
Jiangxi Province Double Thousand Plan
NSFC
Nano Fabrication Facility and Vacuum Interconnected NanotechWorkstation (NANO-X) of Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences
Center for Micro and Nanoscale Research and Fabrication of University of Science and Technology of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
21 articles.
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