Comparison between CVD and thermal oxide dielectric integrity-Reference-Cited by-同舟云学术

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Comparison between CVD and thermal oxide dielectric integrity

Published:1986-09 Issue:9 Volume:7 Page:506-509
ISSN:0741-3106
Container-title:IEEE Electron Device Letters
language:
Short-container-title:IEEE Electron Device Lett.

Author:

Lee J.,Chen I.-C.,Hu C.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx5/55/31968/01486277.pdf?arnumber=1486277

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