Monte Carlo Simulation of Leakage Currents in $ \hbox{TiN/ZrO}_{2}/\hbox{TiN}$ Capacitors-Reference-Cited by-同舟云学术

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Monte Carlo Simulation of Leakage Currents in $ \hbox{TiN/ZrO}_{2}/\hbox{TiN}$ Capacitors

Published:2011-02 Issue:2 Volume:58 Page:327-334
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Jegert Gunther¹,Kersch Alfred²,Weinreich Wenke³,Lugli Paolo¹

Affiliation:

1. Institute for Nanoelectronics, Department of Electrical Engineering and Information Technology, Technical University of Munich, Munich, Germany

2. Munich University of Applied Sciences, Munich, Germany

3. Fraunhofer Center Nanoelectronic Technology, Dresden, Germany

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx5/16/5697316/05648720.pdf?arnumber=5648720

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