AlN/Sapphire-Based SAW Resonators With Q Over 10000 for Temperature Sensors-Reference-Cited by-同舟云学术

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AlN/Sapphire-Based SAW Resonators With Q Over 10000 for Temperature Sensors

Published:2023-04-15 Issue:8 Volume:23 Page:8261-8267
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Ai Yujie¹^ORCID,Lv Hongrui²,Huang Yinglong³,He Jiaheng¹^ORCID,Wang Ye⁴,Wu Jiwen⁵,Zhang Yun¹^ORCID

Affiliation:

1. Institute of Semiconductors, Chinese Academy of Sciences, Beijing, China

2. Chongqing United Micro-Electronics Center, Chongqing, China

3. China Electronics Standardization Institute, Beijing, China

4. Department of Electronic and Information Engineering, Lishui University, Lishui, China

5. Lishui Zhongke Semiconductor Material Company Ltd., Lishui, China

Funder

Chinese Academy of Sciences (CAS) Project for Young Scientists in Basic Research

One Hundred Person Project of CAS

National Natural Sciences Foundation of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/10102602/10068434.pdf?arnumber=10068434

Reference40 articles.

1. Quality-enhanced AlN epitaxial films grown on c-sapphire using ZnO buffer layer for SAW applications

2. Characterization of highly textured piezoelectric AlN films obtained from aluminum and ammonium chloride by a simple vapor deposition process

3. Deep-UVsensors based on SAW oscillators using low-temperature-grown AlN films on sapphires

4. High quality AlN for deep UV photodetectors

5. High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient

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1. Orbital hybridization and defective states of vacancy defects in AlN;Materials Today Communications;2024-06

2. Machine learning as a new strategy for designing surface acoustic wave resonators;Sensors and Actuators A: Physical;2024-04

3. High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film;Applied Physics Letters;2023-12-18

4. Advances in the surface acoustic wave sensors for industrial applications: Potentials, challenges, and future directions: A review;Measurement;2023-11

5. A Quadrature Phase-Locked Loop Based Digital Closed-Loop System for MEMS Resonant Sensors;2023 IEEE SENSORS;2023-10-29

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