A Quadrature Phase-Locked Loop Based Digital Closed-Loop System for MEMS Resonant Sensors
Author:
Affiliation:
1. Aerospace Information Research Institute, Chinese Academy of Sciences,State Key Laboratory of Transducer Technology,Beijing,CHINA
Funder
National Key R&D Program of China
National Natural Science Foundation of China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10324456/10324848/10325265.pdf?arnumber=10325265
Reference11 articles.
1. Temperature Dependence of Quality Factors at High Frequencies in MEMS Gyroscopes
2. Temperature Dependence of Quality Factor in MEMS Resonators
3. A dual quantization electromechanical sigma-delta modulator vibratory wheel gyroscope
4. A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors
5. An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer
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1. A Digital Closed-Loop Control System for MEMS Resonant Pressure Sensors Based on a Quadrature Phase-Locked Loop;IEEE Sensors Journal;2024-04-01
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