High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient-Reference-Cited by-同舟云学术

High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient

Published:2014-09-29 Issue:13 Volume:105 Page:133502
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Wang Wenbo¹,Mayrhofer Patrick M.²,He Xingli¹,Gillinger Manuel²,Ye Zhi¹,Wang Xiaozhi¹,Bittner Achim²,Schmid Ulrich²,Luo J. K.¹³

Affiliation:

1. Department of Information Science and Electronic Engineering, Zhejiang University and Cyrus Tang Centre for Sensor Materials and Applications, 38 Zheda Road, Hangzhou 310027, China

2. Institute of Sensor and Actuator Systems, Vienna University of Technology, Floragasse, 7/2/366-MST, A-1040 Vienna, Austria

3. Institute of Renewable Energy Environmental Technology, University of Bolton, Deane Road, Bolton BL3 5AB, United Kingdom

Funder

Fundamental Research Funds for the Central Universities of China

National Natural Science Foundation of China (NSFC)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4896853

Reference31 articles.

1. Cost-effective and high frequency surface acoustic wave filters on ZnO:Fe/Si for low-loss and wideband application

2. ZnO nanoparticle surface acoustic wave UV sensor

3. Bendable transparent ZnO thin film surface acoustic wave strain sensors on ultra-thin flexible glass substrates

4. Flexible surface acoustic wave resonators built on disposable plastic film for electronics and lab-on-a-chip applications

5. Surface Acoustic Wave Microfluidics

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