Bendable transparent ZnO thin film surface acoustic wave strain sensors on ultra-thin flexible glass substrates

Author:

Chen Jinkai1234,He Xingli1234,Wang Wenbo1234,Xuan Weipeng1234,Zhou Jian1234,Wang Xiaozhi1234,Dong S. R.1234,Garner Sean56,Cimo Pat56,Luo J. K.12347

Affiliation:

1. Dept. of Info. Sci. & Electron. Eng.

2. Zhejiang University

3. Cyrus Tang Center for Sensor Mater. & Appl.

4. Hangzhou 310027, P. R. China

5. Corning Incorporated

6. Corning, USA

7. Inst. of Renew. Energ. & Environ. Technol.

Abstract

We demonstrated the flexible SAW sensors based on ultra-thin glass, which have the tremendous capability to detect strains in a very wide range (∼5 times larger than others) with a sensitivity of ∼34.7 Hz με−1.

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

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