Low-Loss SAW Devices with LiTaO3 on Extremely High Resistance Substrate

Author:

Wu Jinbo,Zhang Shibin,Zhou Hongyan,Zhang Liping,Zheng Pengcheng,Li Zhongxu,Wang Yuxi,Huang Kai,You Tiangui,Wu Tao,Ou Xin

Publisher

IEEE

Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Higher Order Mode Elimination for SAW Resonators Based on LiNbO₃/SiO₂/poly-Si/Si Substrate by Si Orientation Optimization;Journal of Microelectromechanical Systems;2024-04

2. Heterostructure-Based Surface Acoustic Wave Resonator for Gas Sensing;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03

3. A Novel SAW Resonator with Anti-Groove Structure Based on Heterogeneous Substrate;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03

4. SAW Filters on LiNbO3/SiC Heterostructure for 5G n77 and n78 Band Applications;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-09

5. Universal PBTI Relaxation on the Negative VTH Shift in Oxide Semiconductor Transistors and New Insights;IEEE Electron Device Letters;2023-07

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