Heterostructure-Based Surface Acoustic Wave Resonator for Gas Sensing
Author:
Affiliation:
1. Wuhan University,The Institute of Technological Sciences,Wuhan,China
2. Wuhan University,School of Microelectronics,Wuhan,China
3. Hubei Yangtze Memory Laboratories,Wuhan,China
Funder
National Science Foundation
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10306337/10306342/10308148.pdf?arnumber=10308148
Reference9 articles.
1. Low-Loss SAW Devices with LiTaO3 on Extremely High Resistance Substrate
2. Wafer-Scale Fabrication of 42° Rotated Y-Cut LiTaO3-on-Insulator (LTOI) Substrate for a SAW Resonator
3. A Low-Loss Wideband SAW Filter With Low Drift Using Multilayered Structure
4. Optimization of SAW Devices with LGS/Pt Structure for Sensing Temperature
5. Diaphragm shape effect on the sensitivity of surface acoustic wave based pressure sensor for harsh environment
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