Wafer-Scale Fabrication of 42° Rotated Y-Cut LiTaO3-on-Insulator (LTOI) Substrate for a SAW Resonator-Reference-Cited by-同舟云学术

Wafer-Scale Fabrication of 42° Rotated Y-Cut LiTaO3-on-Insulator (LTOI) Substrate for a SAW Resonator

Published:2019-07-12 Issue:8 Volume:1 Page:1660-1666
ISSN:2637-6113
Container-title:ACS Applied Electronic Materials
language:en
Short-container-title:ACS Appl. Electron. Mater.

Author:

Yan Youquan¹²^ORCID,Huang Kai¹,Zhou Hongyan¹²,Zhao Xiaomeng¹,Li Wenqin¹,Li Zhongxu¹²,Yi Ailun¹²,Huang Hao¹,Lin Jiajie¹²,Zhang Shibin¹²,Zhou Min¹,Xie Junyu³,Zeng Xiaobin³,Liu Renjie⁴,Yu Wenjie¹²,You Tiangui¹,Ou Xin¹²^ORCID

Affiliation:

1. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

3. Beijing Zhongkexin Electronics Equipment Co., Ltd., Beijing 101111, China

4. Kingstone Semiconductor Joint Stock Co., Ltd., Pudong, Shanghai, China

Funder

Ministry of Science and Technology of the People's Republic of China

Science and Technology Commission of Shanghai Municipality

National Natural Science Foundation of China

Chinese Academy of Sciences

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Electrochemistry,Electronic, Optical and Magnetic Materials