Higher Order Mode Elimination for SAW Resonators Based on LiNbO₃/SiO₂/poly-Si/Si Substrate by Si Orientation Optimization-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Higher Order Mode Elimination for SAW Resonators Based on LiNbO₃/SiO₂/poly-Si/Si Substrate by Si Orientation Optimization

Published:2024-04 Issue:2 Volume:33 Page:163-173
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Xu Huiping¹,Fu Sulei¹^ORCID,Su Rongxuan¹,Liu Peisen¹,Xiao Boyuan¹^ORCID,Zhang Shuai²,Wang Rui¹,Song Cheng¹^ORCID,Zeng Fei¹^ORCID,Wang Weibiao³,Pan Feng¹^ORCID

Affiliation:

1. Key Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing, China

2. School of Internet of Things Engineering, Jiangnan University, Wuxi, Jiangsu, China

3. Shoulder Electronics Ltd., Wuxi, Jiangsu, China

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Key Research Development Program of Guangdong Province

Natural Science Foundation of Beijing Municipality

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/84/10494013/10460323.pdf?arnumber=10460323

Reference59 articles.

1. 5-GHz Antisymmetric Mode Acoustic Delay Lines in Lithium Niobate Thin Film

2. Multiplying Channel Capacity: Aggregation of Fragmented Spectral Resources

3. Evolution toward 5G multi-tier cellular wireless networks: An interference management perspective

4. SAW Characteristics of AlN/SiO2/3C-SiC Layered Structure With Embedded Electrodes

5. High $Q$ Antisymmetric Mode Lithium Niobate MEMS Resonators With Spurious Mitigation

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP