55.4 GHz Bulk Acoustic Resonator in Thin-Film Scandium Aluminum Nitride
Author:
Affiliation:
1. The University of Texas at Austin,Department of Electrical and Computer Engineering,Austin,US
2. Northeastern University,Department of Electrical Engineering,Boston,US
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10306337/10306342/10307629.pdf?arnumber=10307629
Reference33 articles.
1. Aluminum Nitride Combined Overtone Resonators for the 5G High Frequency Bands
2. Analysis of 5−10 GHz Higher-Order Lamb Acoustic Waves in Thin-Film Scandium Aluminum Nitride
3. Epitaxial Aluminum Scandium Nitride Super High Frequency Acoustic Resonators
4. X-band epi-BAW resonators
5. A1 Resonators in 128° Y-cut Lithium Niobate with Electromechanical Coupling of 46.4%
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4. Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride Using Platinum Electrodes;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
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