A 56 GHz Trilayer AlN/ScAlN/AlN Periodically Poled FBAR
Author:
Affiliation:
1. The University of Michigan,Electrical Engineering and Computer Science Department,USA
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx8/10600173/10600174/10600386.pdf?arnumber=10600386
Reference32 articles.
1. From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications
2. A decade of FBAR success and what is needed for another successful decade
3. XBAW, An Enabling Technology for Next Generation Resonators and Filter Solutions for 5G and Wi-Fi 6/6E/7 applications (Invited)
4. 452 MHz Bandwidth, High Rejection 5.6 GHz UNII XBAW Coexistence Filters Using Doped AlN-on-Silicon
5. 11E-2 Review and Comparison of Bulk Acoustic Wave FBAR, SMR Technology
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