Analysis of 5−10 GHz Higher-Order Lamb Acoustic Waves in Thin-Film Scandium Aluminum Nitride
Author:
Affiliation:
1. The University of Texas at Austin,Department of Electrical and Computer Engineering,Austin,US
2. Northeastern University,Department of Electrical and Computer Engineering,Boston,US
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10272029/10272034/10272186.pdf?arnumber=10272186
Reference38 articles.
1. Fabrication of high kt2and k’ 352Sc0.4A10.6N thin films by RF magnetron sputtering;shimizu;IEEE International Ultrasonics Symposium IUS,2022
2. Frequency Scaling Millimeter Wave Acoustic Resonators using Ion Beam Trimmed Lithium Niobate
3. 36% Scandium-Doped Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers
4. Microwave Acoustic Devices: Recent Advances and Outlook
5. Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon
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2. Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride Using Platinum Electrodes;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
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4. Frequency Tuning of Suspended Millimeter Wave Lithium Niobate Acoustic Resonators by Ion Beam Assisted Argon Gas Cluster Etching;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03
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