36% Scandium-Doped Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/8556632/8579609/08579694.pdf?arnumber=8579694
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Single-Layer Corrugated Aluminum Nitride Membranes as Piezoelectric Micromachined Ultrasonic Transducers with Differential Readout and Actuation;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03
2. Analysis of 5−10 GHz Higher-Order Lamb Acoustic Waves in Thin-Film Scandium Aluminum Nitride;2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS);2023-05-15
3. A Review of the Recent Applications of Aluminum Nitride-Based Piezoelectric Devices;IEEE Access;2023
4. Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications;Biosensors;2022-12-29
5. Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections;Micromachines;2022-12-19
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