Sub-100nm Al<sub>0.7</sub>Sc<sub>0.3</sub>N Thin Films for Next Generation Bulk Acoustic Wave Resonators and Filters-Reference-Cited by-同舟云学术

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Sub-100nm Al_0.7Sc_0.3N Thin Films for Next Generation Bulk Acoustic Wave Resonators and Filters

Published:2022-10-10 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE International Ultrasonics Symposium (IUS)
language:
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Author:

Liu Chen¹,Li Minghua¹,Wang Nan¹,Zhu Yao¹

Affiliation:

1. Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR),Singapore

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9957114/9957143/09957221.pdf?arnumber=9957221

Reference5 articles.

1. Cadmium Sulphide and Zinc Oxide Thin-Film Transducers

2. Extracting the electromechanical coupling constant of piezoelectric thin film by the high-tone bulk acoustic resonator technique

3. Tech. Dig. - Int. Electron Devices Meet;aigner;IEDM,2019

4. Bulk acoustic wave RF technology

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Acoustic Filters for RF Communication;IEEE Nanotechnology Magazine;2024-02

2. Impact of In-Plane Residual Stress on The Performance of The Film Bulk Acoustic Resonators;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03

3. In‐Grain Ferroelectric Switching in Sub‐5 nm Thin Al_0.74Sc_0.26N Films at 1 V;Advanced Science;2023-06-29

4. Piezoelectric MEMS for Frequency Control and Sensing;2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS);2023-05-15

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