Extracting the electromechanical coupling constant of piezoelectric thin film by the high-tone bulk acoustic resonator technique-Reference-Cited by-同舟云学术

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Extracting the electromechanical coupling constant of piezoelectric thin film by the high-tone bulk acoustic resonator technique

Published:2012-05 Issue:5 Volume:59 Page:958-962
ISSN:0885-3010
Container-title:IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
language:
Short-container-title:IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

Author:

Zhou Chong,Pang Wei,Li Qiang,Yu Hongyu,Hu Xiaotang,Zhang Hao

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation

Link

http://xplorestaging.ieee.org/ielx5/58/6202401/06202419.pdf?arnumber=6202419

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of phase correction produced by trimming layer on thin-film bulk acoustic resonator;Journal of Applied Physics;2024-07-18

2. Impact of Asymmetric Piezoelectricity of 100 nm Al_0.7Sc_0.3N Thin Film on Ferroelectrically Switchable Multi-Layer Bulk Acoustic Wave Resonators;2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS);2023-05-15

3. Impedance-matched high-overtone bulk acoustic resonator;Applied Physics Letters;2023-03-20

4. Sub-100nm Al_0.7Sc_0.3N Thin Films for Next Generation Bulk Acoustic Wave Resonators and Filters;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10

5. Toward 40 GHz excitation of diamond-based HBAR;Applied Physics Letters;2021-02-22

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