Closed-Loop Control of Quasi-Static Scanning PZT Micromirrors with Embedded Piezoresistive Sensing and Spurious Mode Rejection-Reference-Cited by-同舟云学术

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Closed-Loop Control of Quasi-Static Scanning PZT Micromirrors with Embedded Piezoresistive Sensing and Spurious Mode Rejection

Published:2021-06-20 Issue: Volume: Page:
ISSN:
Container-title:2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
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Author:

Frigerio Paolo,Molinari Luca,Barbieri Andrea,Carminati Roberto,Boni Nicolo,Langfelder Giacomo

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9495312/9495375/09495680.pdf?arnumber=9495680

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Control of a quasi-static MEMS Mirror for raster scanning projection applications;International Journal of Optomechatronics;2024-08-16

2. Self-Sensing of a Magnetically Actuated Prism;Sensors;2023-06-10

3. On the use of Kalman filters for high-order mode rejection in PZT-based microscanners;Journal of Micromechanics and Microengineering;2023-03-06

4. State-Space Modeling of a Novel 2-output, single-L Driver for PZT Actuators with Charge Recovery;2022 29th IEEE International Conference on Electronics, Circuits and Systems (ICECS);2022-10-24

5. Piezoresistive Versus Piezoelectric Position Sensing in MEMS Micromirrors: A Noise and Temperature Drift Comparison;IEEE Sensors Letters;2022-03

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