Closed-Loop Control of Quasi-Static Scanning PZT Micromirrors with Embedded Piezoresistive Sensing and Spurious Mode Rejection
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Publisher
IEEE
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http://xplorestaging.ieee.org/ielx7/9495312/9495375/09495680.pdf?arnumber=9495680
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Self-Sensing of a Magnetically Actuated Prism;Sensors;2023-06-10
2. On the use of Kalman filters for high-order mode rejection in PZT-based microscanners;Journal of Micromechanics and Microengineering;2023-03-06
3. State-Space Modeling of a Novel 2-output, single-L Driver for PZT Actuators with Charge Recovery;2022 29th IEEE International Conference on Electronics, Circuits and Systems (ICECS);2022-10-24
4. Piezoresistive Versus Piezoelectric Position Sensing in MEMS Micromirrors: A Noise and Temperature Drift Comparison;IEEE Sensors Letters;2022-03
5. Efficient Phase and Quadrature Control of a PZT Resonant MEMS Microscanner with Piezoresistive Position Sensor;2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS);2022-01-09
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