Abstract
Abstract
This work discusses and compares two strategies for closed-loop control of quasi-static silicon mirrors for raster-scanning applications, actuated by thin films of lead–zirconate–titanate and with embedded piezoresistive angular displacement sensors. A first feedback control approach, based on piezoresistive readout of the device angular displacement through an integrated sensor, shows limitations related to high-order resonant modes of the mechanical structure. To overcome this issue, a feedback control scheme based on the use of a Kalman filter to estimate the angular displacement and velocity of the scanner is presented, achieving a maximum positioning error of 0.14∘ (1.75% of a 8∘ full-scale angular displacement), and a mean error within
±
0.03
∘
(0.74% peak-to-peak) over 80% of the scanned trace.
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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