Self-Sensing of a Magnetically Actuated Prism

Author:

Weber Pascal M.1ORCID,Wallrabe Ulrike1ORCID,Wapler Matthias C.2ORCID

Affiliation:

1. Laboratory for Microactuators, Department of Microsystems Engineering (IMTEK), University of Freiburg, 79085 Freiburg, Germany

2. Laboratory for Microsystems Engineering for Medical Engineering, Faculty of Electrical Engineering and Information Technology, Otto-von-Guericke University Magdeburg, 39016 Magdeburg, Germany

Abstract

We demonstrate a method for self-sensing of a magnetically actuated prism that can be used, e.g., in a feedback-loop without the need of additional sensors. In order to use the impedance of the actuation coils as a measurement parameter, we first obtained the optimal measurement frequency that is well separated from the actuation frequencies and at the same time provides the best compromise between sensitivity to the position and robustness. We then developed a combined actuation and measurement driver, and correlated its output signal to the mechanical state of the prism using a defined calibration sequence. We demonstrate that we can reliably measure the state of each actuator and determine the tilt angle of the prism with an accuracy of ±0.1∘ in the polar angle over a range of ±4∘ and ±20 mrad in the azimuthal angle.

Funder

German Research Foundation

Open Access Publication Fund of Magdeburg University

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

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