Piezoresistive Versus Piezoelectric Position Sensing in MEMS Micromirrors: A Noise and Temperature Drift Comparison
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7782634/9721101/09732673.pdf?arnumber=9732673
Reference16 articles.
1. A novel closed-loop architecture for accurate micromirror trajectory control in linear scanning MEMS-based projectors
2. Closed-Loop Control of Quasi-Static Scanning PZT Micromirrors with Embedded Piezoresistive Sensing and Spurious Mode Rejection
3. Feedback control of thin film PZT MEMS actuator with integrated buried piezoresistors
4. Efficient Phase and Quadrature Control of a PZT Resonant MEMS Microscanner with Piezoresistive Position Sensor
5. Feedback Controlled Pzt Micromirror with Integrated Buried Piezoresistors
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Control of a quasi-static MEMS Mirror for raster scanning projection applications;International Journal of Optomechatronics;2024-08-16
2. A Large-Scan-Range Electrothermal Micromirror Integrated with Thermal Convection-Based Position Sensors;Micromachines;2024-08-08
3. Ormia ochracea Inspired Single-Microphone Approach for 3-D Sound Localization;IEEE Sensors Letters;2024-08
4. An Electrothermal Micromirror Array Integrated with Thermal Convection-Based Mirror Position Sensors;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
5. Adaptive Filter Based on Model Residual Weight Self-Updating for Electromagnetic-Driven Micromirror;IEEE Sensors Journal;2023-12-15
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3