Deep Understanding of Reliability in Hf-based FeFET during Bipolar Pulse Cycling: Trap Profiling for Read-After-Write Delay and Memory Window Degradation

Author:

Cai Puyang1,Zhu Tianxiang1,Duan Jiahui2,Sun Zixuan1,Li Hao1,Xue Yongkang3,Liu Zhiwei3,Xu Hao2,Zhang Liangliang1,Wang Xiaolei2,Ji Zhigang3,Wang Runsheng1,Huang Ru1

Affiliation:

1. Peking University,School of Integrated Circuits,Beijing,China

2. Key Laboratory of Microelectronics Devices and Integrated Technology, Chinese Academy of Sciences,Beijing,China

3. Shanghai Jiao Tong University,Departure of Micro/Nano Electronics,Shanghai,China

Publisher

IEEE

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