Effect of Post-Annealing Conditions on Interfacial Adhesion Energy of Cu-Cu Bonding for 3-D IC Integration-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Effect of Post-Annealing Conditions on Interfacial Adhesion Energy of Cu-Cu Bonding for 3-D IC Integration

Published:2008-04-30 Issue:4 Volume:18 Page:204-210
ISSN:1225-0562
Container-title:Korean Journal of Materials Research
language:en
Short-container-title:Korean Journal of Materials Research

Author:

Jang Eun-Jung,Pfeiffer Sarah,Kim Bi-Oh,Mtthias Thorsten,Hyun Seung-Min,Lee Hak-Joo,Park Young-Bae

Publisher

The Materials Research Society of Korea

Subject

General Materials Science

Link

http://ocean.kisti.re.kr/downfile/crosscheck/mrsk/JAKO200814264574812.pdf

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Simplistic approach to reduce thermal issues in 3D IC integration technology;Materials Today: Proceedings;2021

2. Low Temperature Cu–Cu Bonding Technology in Three-Dimensional Integration: An Extensive Review;Journal of Electronic Packaging;2018-03-01

3. Wafer Bonding Techniques;3D Integration for VLSI Systems;2011-09-26

4. Annealing temperature effect on the Cu-Cu bonding energy for 3D-IC integration;Metals and Materials International;2011-02

5. Effect of Bonding Process Conditions on the Interfacial Adhesion Energy of Al-Al Direct Bonds;Korean Journal of Materials Research;2010-06-27

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP