Comparison Between the Reaction Mechanisms of Nitridation of Si(100) by a NH3 Molecular Beam and by a $\rm{N}^+

Comparison Between the Reaction Mechanisms of Nitridation of Si(100) by a NH3 Molecular Beam and by a $\rm{N}^+_2$ Ion Beam

Published:1998-02 Issue:01 Volume:05 Page:81-84
ISSN:0218-625X
Container-title:Surface Review and Letters
language:en
Short-container-title:Surf. Rev. Lett.

Author:

Kusunoki I.¹,Ishidzuka S.¹,Igari Y.¹,Takaoka T.¹

Affiliation:

1. Research Institute for Scientific Measurements, Tohoku University, Katahira 2-1-1, Aobaku, Sendai 980-77, Japan

Abstract

Nitridation of a Si(100) surface takes place with NH3 at temperatures higher than 600°C and with a low energy [Formula: see text] ion beam at room temperature, formating a thin film of nitride. The nitridation processes have been studied in situ under ultrahigh vacuum by X-ray photoelectron spectroscopy (XPS). The reaction with NH3 occurs on the surface with Si atoms supplied by out-diffusion from the substrate, producing a nitride film. On the other hand, the N atoms of the low energy [Formula: see text] ion beam (100–1000 eV) penetrate into the bulk by their kinetic energy and form the nitride layer near the surface. The difference of these mechanisms is clearly observed in the evolution of the N1s and Si2p XPS spectra during the reaction.

Publisher

World Scientific Pub Co Pte Lt

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

https://www.worldscientific.com/doi/pdf/10.1142/S0218625X98000177

Reference6 articles.

1. Thermal nitridation of Si(100)-2 × 1 surface by NH3: XPS results

2. Thermally grownSi3N4thin films on Si(100): Surface and interfacial composition

3. Electronic structure of the nitride layers formed on a Si(111) surface: angle-resolved photoemission study

4. Photoemission studies of the reactions of ammonia and N atoms with Si(100)-(2×1) and Si(111)-(7×7) surfaces

5. Nitridation of a Si(100) surface by 100–1000 eV N+2 ion beams

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1. XPS study of nitridation of diamond and graphite with a nitrogen ion beam;Surface Science;2001-10

2. Chemical Maps and SEM Images of the Reaction Products on Si Surfaces Irradiated with Cold and Hot C2H4 Beams;Atomic and Molecular Beams;2001

3. Nitridation of Si(100) surface with NH3;Applied Surface Science;1998-06