Thermal nitridation of Si(100)-2 × 1 surface by NH3: XPS results
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference30 articles.
1. Thermal Nitridation of Silicon in Ammonia Gas: Composition and Oxidation Resistance of the Resulting Films
2. Nitridation of Silicon and Oxidized‐Silicon
3. Reaction of Si(100) single crystals with nitrogen atoms
4. Kinetics of Si(100) nitridation first stages by ammonia: Electron- beam-induced thin film growth at room temperature
5. High temperature nitridation structures of the Si(111)-(7×7) surface
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