SILICON-ON-INSULATOR MESFETS AT THE 45NM NODE

Author:

LEPKOWSKI WILLIAM1,WILK SETH J.1,GHAJAR M. REZA2,PARSI ANURADHA2,THORNTON TREVOR J.2

Affiliation:

1. SJT Micropower Inc., 16411 N. Skyridge Lane, Fountain Hills, AZ 85268-1515, USA

2. School of Electrical, Computer and Energy Engineering, Arizona State University, PO Box 876206, Tempe, AZ 85287-6206, USA

Abstract

Metal-semiconductor field-effect-transistors (MESFETs) have been fabricated using a commercially available 45nm silicon-on-insulator (SOI) CMOS foundry with no changes to the process flow. Depending upon the layout dimensions, these n-channel, depletion mode devices can be designed for high current drive (IDSAT≥ 100mA/mm ), high operating frequency (fmax> 35 GHz ) or enhanced breakdown voltage (VBD> 25 V ). The design flexibility provided by the SOI MESFETs, coupled with the high performance of ULSI CMOS at the 45nm node will enable a variety of analog, RF and mixed signal applications.

Publisher

World Scientific Pub Co Pte Lt

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Electronic, Optical and Magnetic Materials

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Simulation and Comparison of Current-Voltage characteristics of MESFET by Varying Channel Length and Comparing it with Single Gate MOSFET to Optimize Conductivity;2022 14th International Conference on Mathematics, Actuarial Science, Computer Science and Statistics (MACS);2022-11-12

2. High Breakdown Voltage MESFETs Integrated with SOI CMOS Technologies;2019 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S);2019-10-14

3. CMOS-Compatible MESFETs for High Power RF Integrated Circuits;IEEE Transactions on Semiconductor Manufacturing;2019-02

4. SOI MESFETs on high-resistivity, trap-rich substrates;Solid-State Electronics;2018-04

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