Quantitative backscattered electron imaging of field emission scanning electron microscopy for discrimination of nano-scale elements with nm-order spatial resolution-Reference-Cited by-同舟云学术

Quantitative backscattered electron imaging of field emission scanning electron microscopy for discrimination of nano-scale elements with nm-order spatial resolution

Published:2010-04-07 Issue:5 Volume:59 Page:379-385
ISSN:0022-0744
Container-title:Journal of Electron Microscopy
language:en
Short-container-title:Journal of Electron Microscopy

Author:

Kim H.,Negishi T.,Kudo M.,Takei H.,Yasuda K.

Publisher

Oxford University Press (OUP)

Subject

Instrumentation

Link

http://academic.oup.com/jmicro/article-pdf/59/5/379/2557943/dfq012.pdf

Reference19 articles.

1. Backscattering coefficient measurements of 15 to 60 keV electrons for solids at various angles of incidence

2. Electron backscattering from thin films

3. Determination of the electron backscattering coefficient for thin films using double layers

4. Elastic electron backscattering from surfaces with overlayers

5. Elastic electron backscattering from surfaces: Prediction of maximum intensity

Cited by 26 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Electron backscattering coefficients for Cr, Co, and Pd solids: A Monte Carlo simulation study;Journal of Applied Physics;2024-06-11

2. Sub-surface Imaging of Porous GaN Distributed Bragg Reflectors via Backscattered Electrons;Microscopy and Microanalysis;2024-04

3. Emission of the backscattered electron in the energy range of 20 to100 keV;Annals of Nuclear Energy;2024-02

4. Expanding the Analytical Capabilities of Scanning Electron Microscopy in the Detection of Backscattered Electrons;Instruments and Experimental Techniques;2023-12

5. РАСШИРЕНИЕ АНАЛИТИЧЕСКИХ ВОЗМОЖНОСТЕЙ СКАНИРУЮЩЕЙ ЭЛЕКТРОННОЙ МИКРОСКОПИИ ПРИ ДЕТЕКТИРОВАНИИ ОБРАТНОРАССЕЯННЫХ ЭЛЕКТРОНОВ;Приборы и техника эксперимента;2023-11-01