Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications
Author:
Publisher
Institute of Electronics, Information and Communications Engineers (IEICE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review;Micromachines;2020-04-10
2. Application of a Gas-Injection System during the FIB-TOF-SIMS Analysis—Influence of Water Vapor and Fluorine Gas on Secondary Ion Signals and Sputtering Rates;Analytical Chemistry;2019-08-20
3. Mechanical behavior of microscale carbon pillar fabricated by focused ion beam induced deposition;International Journal of Precision Engineering and Manufacturing;2014-07
4. MEMS Lithography and Micromachining Techniques;MEMS Reference Shelf;2011
5. Nanoimprint lithography stamp modification utilizing focused ion beams;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2009
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