Application of a Gas-Injection System during the FIB-TOF-SIMS Analysis—Influence of Water Vapor and Fluorine Gas on Secondary Ion Signals and Sputtering Rates-Reference-Cited by-同舟云学术

Application of a Gas-Injection System during the FIB-TOF-SIMS Analysis—Influence of Water Vapor and Fluorine Gas on Secondary Ion Signals and Sputtering Rates

Published:2019-08-20 Issue:18 Volume:91 Page:11712-11722
ISSN:0003-2700
Container-title:Analytical Chemistry
language:en
Short-container-title:Anal. Chem.

Author:

Priebe Agnieszka¹^ORCID,Utke Ivo¹,Pethö Laszlo¹,Michler Johann¹

Affiliation:

1. Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland

Funder

H2020 Marie Sklodowska-Curie Actions

Publisher

American Chemical Society (ACS)

Subject

Analytical Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.analchem.9b02287

Reference65 articles.

1. FIB Nanostructures

2. Focused Ion Beam Microscopy and Micromachining

3. Introduction to Focused Ion Beams

4. Specifications for Hard Condensed Matter Specimens for Three-Dimensional High-Resolution Tomographies

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