Thickness and substrate effects on AlN thin film growth at room temperature-Reference-Cited by-同舟云学术

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Thickness and substrate effects on AlN thin film growth at room temperature

Published:2008-05-06 Issue:3 Volume:43 Page:309-313
ISSN:1286-0042
Container-title:The European Physical Journal Applied Physics
language:
Short-container-title:Eur. Phys. J. Appl. Phys.

Author:

Abdallah B.,Duquenne C.,Besland M. P.,Gautron E.,Jouan P. Y.,Tessier P. Y.,Brault J.,Cordier Y.,Djouadi M. A.

Publisher

EDP Sciences

Subject

Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://www.epjap.org/10.1051/epjap:2008082/pdf

Reference11 articles.

1. P. Martin, R. Netterfield, T. Kinder, A. Bendavid, Appl. Opt.31,6734 (1992)

2. R. Bensalem, A. Abid, B.J. Sealy, Thin Solid Films143,141 (1986)

3. C.C. Tin, Y. Song, T. Isaacs-Smith, V. Madangarli, T.S. Sudarshan, J. Electron. Mater.26,212 (1997)

4. J. Szmidt, Chaos, Solitons & Fractals10,2099 (1999)

5. J. Meinshien, G. Behme, F. Falk, H. Stafast, Appl. Phys. A69(Suppl.), S683 (1999)

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